a major technological breakthrough, an important new advance in technology, to achieve a breakthrough in…, to make major progress in something, a breakthrough to (EUV), an advance leading to EUV development, recent months vs. last months, up to now vs. the previous months, to pencil sth/sb in - let’s pencil it in!, to arrange something without full confidence, to come to an agreement, to reach a shared decision, to make a suggestion, to propose an idea, the objection to this was…, the criticism or opposition was…

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